MEMS: A Practical Guide to Design, Analysis, and Applications: Korvink, Jan, Paul, Oliver: 9780815514978: Amazon.com: Books
Design of a Monolithic 3DOF MEMS Capacitive Accelerometer: Utilizing Surface Micromachining Technology Using PolyMUMPS Process: Khan, Muhammad Shuja: 9783845409528: Amazon.com: Books
Hybrid Micro-Electro-Mechanical Tunable Filter: Ochoa, Edward M.: 9781288397136: Amazon.com: Books
Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics, 41): Cercignani, Carlo: 9783764375348: Amazon.com: Books
Micro Electro Mechanical System Design (Mechanical Engineering): Allen, James J., Allen, James J.: 9780824758240: Amazon.com: Books
Ceramic Thick Films for MEMS and Microdevices (Micro and Nano Technologies): Dorey, Robert A.: 9780128103579: Amazon.com: Books
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Area Coverage in Hybrid Wireless Sensor Networks: Issues and Pragmatic Solutions: Ahmed, Nadeem: 9783639219319: Amazon.com: Books
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